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MicroFLOW SF6 .100 Vol.-%

VKM2002985 | VKM2002985

Inline NDIR gas sensor for measurement of sulfur hexafluoride up to 100% by volume

  • Very high measuring accuracy: < 1 % max. deviation
  • High long-term stability thanks to NDIR dual-beam method
  • Pressure compensation through integrated pressure sensor in the cell block
  • Digital interfaces RS232/ CAN-Bus integrated as standard
  • Cell optimized for SF6 sample gas in the measuring range up to 100 % by volume
from 949,00 

plus taxes and shipping


Euro $ US-Dollar

Bulk prices (Minimum order quantity: 1 Pieces)

from 1 Pieces 1.496,00  / Piece
from 10 Pieces 1.085,00  / Piece
from 25 Pieces 1.040,00  / Piece
from 50 Pieces 988,00  / Piece
from 100 Pieces 949,00  / Piece


Sulphur hexafluoride is still indispensable in many applications as a trace, protective or insulating gas. Due to the high greenhouse effect of SF6, responsible handling of the gas is all the more important. The MicroFLOW SF6.100 Vol.-% sensor is suitable for a wide range of demanding applications that require precision and reliability.


Industry: SF6 is used in plasma etching processes to create precise patterns on semiconductor materials such as silicon, silicon dioxide and other compounds. The gas is used in special etching chambers where it is converted into a plasma by applying high-frequency energy. This plasma then reacts selectively with the material and enables the precise engraving or removal of materials in a very controlled and accurate process.

In the production of aluminum, sulfur hexafluoride is used as a tracer gas to improve the efficiency of the production process and detect potential problems at an early stage. It is also used in this area to monitor the quality and consistency of the end product.

Energy technology: In the field of electricity supply, SF6 is used as an insulating gas and cooling medium in high-voltage switchgear and transformers. The measurement of sulphur hexafluoride is important in order to identify leaks at an early stage and to monitor the condition of the systems.



Our NDIR gas sensor achieves precise results when measuring and monitoring sulfur hexafluoride. With 10-point linearization, the maximum deviation of the measured gas concentration is less than one percent over the entire measuring range up to 100 percent by volume.

The sensor reliably detects minimal gas concentrations to recognize even the smallest changes in the gas mixture. You are free to choose your application's measuring range, such as 90 vol.-%, from the full measuring range of 0 to 100 vol.-%.

Any deviations resulting from pressure fluctuations or barometric changes are compensated for with the µP.sens pressure sensor in the cuvette block (< 0.1 % / 10 hPa), eliminating any potential leaks or falsification of measured values. The module's overall space requirement is reduced in comparison to similar sensors by integrating the pressure sensor into the cuvette block.

Temperature compensation is ensured for each sensor. Testing and calibration of each module take place in the climate chamber, recording and adjusting the error curve during measurement with a test gas of specific concentration. The test and calibration are performed at the operating range of the sensor from 5 to 45 °C, including the zero and span points, as well as at other typical temperatures within the operating range of the sensor. The maximum deviation is less than 1 % per 10K.



The RS232 and CAN-Bus digital interfaces commonly used in industry are available as standard. Select an interface for your individual configuration. If needed, you can change the interface later using the MARS light software. Follow the software manual for instructions. Adhere strictly to metrics and units.

The cuvette is optimized for measuring sulphur hexafluoride up to 100% by volume.

Compared to conventional sensors, our sensor permits measurements in a wide pressure range of 300 - 1200 hPa. For instance, the sensor is suitable for higher geographical locations or systems that require negative pressure measurement.


The anodized aluminum gas connection blocks ensure long service life and reliability in harsh environmental conditions. The stainless steel gas connections additionally enhance durability.

Tests conducted in the climatic chamber within the operating temperature range eliminate premature component failures.



Download the MARS light software for gas sensors at no cost and get started with your gas sensor right away. The software eliminates the need to create your own and saves you time on initial test measurements. Consuming less than 1 watt, the sensor can be be used with battery-powered devices. Integration is easy, with a wide voltage range of 9 to 30 volts, allowing it to connect with most existing systems.

Gases may require pre-cooling or heating for analysis, depending on the specific needs. To prevent potential gas condensation effects in the cuvette, it is possible to monitor the gas temperature in the measurement system.

Our modular design makes cleaning and maintenance simple, unlike many comparable products.

Detailed information on installation and operation can be found in the user manual.

Our data sheet briefly lists the most important technical details. We will be happy to advise you on your individual questions and requirements.

Technical data

Measuring gas
  • SF6