IR Sources

Our IR emitters ensure reliable and precise measurement results in NDIR gas analysis. For every application, we have the optimal combination of engineering and packaging technologies and MEMS emitter chips, produced in our own factories.

Micro-Hybrid JSIR emitters are NAC or C-MOSI® MEMS-based infrared emitters with true blackbody radiation characteristics. From economy IR emitters for mass applications to high-end radiation sources for demanding measurement tasks, our JSIR emitters cover all application areas for measuring and monitoring gas concentrations.

Different chip sizes or technologies? We will be happy to advise you.

Benefits

Harsh environments

HermeSEAL® hermetic sealing - for use in harsh environments, backfilling with various gases for more efficiency.

High Emissivity

due to high membrane temperatures - good spectral emission; true blackbody radiation

Long lifetime

Reliability due to the high stability of the membrane.

Individual

customer-specific adaptations: Filters, filling gases, etc.; Economy - Premium - High-End Products

IR sources product overview

HermeSEAL® Technology

This unique packaging process was developed by Micro-Hybrid in cooperation with Jenoptik: By soldering a metalized filter to the reflector or cap, hermetically sealed IR emitter with high efficiency are created. HermeSEAL emitters can therefore also be used in harsh environments for which conventional IR components are not suitable. These include high temperatures or high humidity.

Benefits

  • Increased service life through the reduction of oxidation processes
  • Backfilling with different gases for variation of radiation power and time constant
  • High safety for explosion-protected applications
  • Ideal for battery or stand-alone low power applications

JSIR 340 - C-MOSI® - based Economy IR emitter

The MEMS chip used in our infrared emitters consists of a multi-layer heating plate membrane containing a high-temperature stable metal C-MOSI® layer. The emitter chip is based on a silicon substrate with an etched backside membrane. All thin film processes are performed with standard MEMS processes and CMOS-compatible materials. The active C-MOSI® resistive layer is protected against aging and the environment.

Benefits

  • Cost-Effective Components: Standard MEMS Technologies and CMOS compatible
  • Effective automatic assembly processes possible due to SMD housing
  • Membrane temperatures up to 800 °C for optimum radiation performance
  • High modulation depth due to low thermal mass

JSIR 350 - NAC based premium IR emitter

JSIR 350 are MEMS-based infrared emitters characterized by particularly high radiant power. By combining standard silicon material technology with NAC coatings, Micro-Hybrid offers a new generation of IR MEMS products with exceptional performance. The Class 350 JSIR emitters are ideal for gas analysis applications in areas such as biotechnology, industry and agriculture.

Benefits

  • Increased service life through the reduction of oxidation processes
  • Backfilling with different gases for variation of radiation power and time constant
  • High safety for explosion-protected applications
  • Ideal for battery or stand-alone low power applications

JSIR 360 - high-end black silicon IR emitter

High-quality MEMS-based infrared radiation sources for NDIR gas analysis in medical technology and demanding applications in biotechnology, industry and agriculture. The MEMS chip used in our infrared emitters consists of a multilayer heating plate membrane containing a high-temperature stable metal heater layer and advanced silicon-metal micro-structured surfaces. A final passivation layer guarantees long-term stability of the emission behavior at heating plate temperatures of up to 850 °C. The emitter chip is based on a silicon substrate with a back-etched membrane. All thin film processes are performed with CMOS compatible materials.

Benefits

  • True blackbody radiation
  • Highest radiation intensities due to heating plate temperatures up to 850°C in combination with the emission coefficient Ɛ ~ 1
  • Long service life due to thermally-mechanically adapted membrane
  • Drift-free spectral behavior; even in hermetically sealed enclosures